The Logitech EP2 Grooved Polyurethane Pad, 24 in, 10 mm XY (0CON-490) is a porous expanded polyurethane pad manufactured for chemical mechanical polishing of hard materials. This single 24 in (600 mm) EP2-G pad features a 1.3 mm thickness, 10 mm XY grooving and pressure-sensitive adhesive backing for the Logitech Orbis polishing system.
Key Features
- 24 in (600 mm) pad diameter, sized for use with the Logitech Orbis polishing system
- 10 mm XY grooved surface, supporting slurry distribution across larger polishing areas
- Grooved EP2-G configuration, designed for polishing surfaces greater than 20 cm²
- Micro-cellular EP2 structure, providing a sponge-like response while maintaining hardness and flatness
- 1.3 mm pad thickness, equivalent to approximately 0.050 in
- Pressure-sensitive adhesive backing, enabling secure attachment to a clean, smooth and flat base plate
- Controlled pad density, specified at 0.59 g/cm³ in the technical data sheet
- Balanced pad hardness, with a Shore A hardness range of 84–86 and Shore D hardness of 32
- Controlled compressibility, with a stated dynamic compressibility of 9.3%
- High elastic recovery, with a stated elastic rebound of 93%
- Efficient abrasive retention, helping maintain polishing media at the pad surface during CMP
- Broad hard-material suitability, including sapphire, silicon, semiconductor substrates, aluminium nitride, aluminium, PZT, optics, alexandrite rods and ceramics
- Single-pad supply format, providing one replacement polishing pad per order
Note: Apply the pad to a clean, smooth and flat base plate, roll it on to minimise trapped air and condition the surface before processing. Use nitrile gloves during handling to reduce cross-contamination.
Benefits
- Supports fast polishing while maintaining effective control of sample flatness.
- Improves slurry movement across larger samples through the XY-grooved surface.
- Recovers after compression to support stable and consistent polishing contact.
- Helps produce high-quality surface finishes across suitable semiconductor, optical and ceramic materials.
- Provides the verified pad size and configuration required for the Logitech Orbis system.
Why Choose the Logitech EP2 Grooved Polyurethane Pad, 24 in, 10 mm XY (0CON-490)?
The Logitech EP2 Grooved Polyurethane Pad, 24 in, 10 mm XY (0CON-490) combines a micro-cellular structure, controlled compressibility and grooved slurry distribution for precision CMP of larger hard-material surfaces. John Morris Group supplies this exact Logitech Orbis polishing pad for semiconductor, optical and advanced-material processing applications across Australia.
