The Logitech EP1 Grooved Polyurethane Pad, 14 in, 10 mm XY (0CON-400) is a high-hardness expanded polyurethane pad for chemical mechanical polishing of hard materials. This pack contains five 14 in (350 mm) EP1-G pads with 10 mm XY grooving and pressure-sensitive adhesive backing for the Logitech LP50 polishing system.
Key Features
- 14 in (350 mm) pad diameter, sized for the Logitech LP50 polishing system
- 10 mm XY grooved surface, supporting effective slurry distribution across the polishing area
- Grooved EP1-G configuration, suited to polishing surfaces greater than 20 cm²
- Pack of five pads, supporting routine replacement and ongoing polishing requirements
- High-hardness EP1 construction, with a Shore A hardness range of 95–97
- Foamed elastomer structure, incorporating controlled cells to support sample planarity
- Pressure-sensitive adhesive backing, enabling stable attachment to a clean, smooth and flat base plate
- Controlled pad density, specified at 0.70 g/cm³
- Low compressibility, with a stated compressibility of 7.5%
- High elastic recovery, with a stated elastic rebound of 93%
- Efficient abrasive retention, helping keep polishing media at the pad surface during CMP
- Suitable for hard materials, including silicon, sapphire, ceramics, optical materials, silicon carbide, titanium CMP and alexandrite rods
Note: Apply the pad to a clean, smooth and flat base plate, roll it on to minimise trapped air and condition the surface before processing. Use nitrile gloves during handling to reduce cross-contamination.
Benefits
- Supports improved sample planarity during precision CMP processes.
- Distributes slurry across larger polishing areas through the XY-grooved surface.
- Helps produce high-quality surface finishes while maintaining surface flatness.
- Provides controlled compression and recovery for stable polishing contact.
- Supplies the verified size, pad grade and configuration required for the Logitech LP50.
Why Choose the Logitech EP1 Grooved Polyurethane Pad, 14 in, 10 mm XY (0CON-400)?
The Logitech EP1 Grooved Polyurethane Pad, 14 in, 10 mm XY (0CON-400) combines high hardness, controlled-cell construction and grooved slurry distribution for precision polishing of hard materials. John Morris Group supplies this exact pack of five Logitech LP50 polishing pads for semiconductor, optical and advanced-material processing applications across Australia.
