The D28H dual-range manometer, an applicationspecific absolute Baratron capacitance manometer, is the latest addition to the MKS family of general purpose manometers. With two distinct measurement outputs, the D28H provides accurate, reliable, and repeatable pressure measurements for multi-step processes. The D28H is heated to 100°C and is available in Full Scale ranges of 1, 10, 100 and 1000 Torr, with a customer specified second output having either a 2, 5, or 10 times lower Full Scale pressure output to provide a proportionally higher sensitivity.
The lower pressure limitation of system A/D resolution is now minimized with higher output signal levels. The D28H requires ±15 VDC (±5%) input at 500 mA (max.), and provides two outputs of 0 to 10 VDC linear with pressure.
Based on the well-established Baratron capacitance manometer technology, the sensor’s wetted surfaces are made of Inconel for corrosion resistance and process compatibility. Measurements are independent of gas composition. The modern stainless steel enclosure provides a cleanroom-compatible product.
Key Benefits
- Measures total pressure directly, independent of gas composition
- High overpressure rating for improved reliability
- Cleanroom-compatible stainless steel package
Part Number Breakdown:
D28H - D28H Manometer
12M - range of 100 Mbar
HA - Mini-CF Fittings
E - standard accuracy
0 - specific orientation for calibration not required
B - 15 pin Type D connectors with thread locks
0 - 10 to 1 second range gain ratio
