TURBOVAC MAGiNTEGRA – Magnetically Levitated Turbo Vacuum Pumps with Integrated Control Electronics

Oerlikon Leybold launched the first commercially available MagLev Turbo pump in 1975. As pioneers in the field, and with over 150 patents, the MAGiNTEGRA range of MagLev turbo vacuum pumps have reaffirmed Oerlikon Leybold’s position as the most respected vacuum pump manufacturer today. 

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller and interconnecting cables are no longer necessary.

Pumping speeds range from 300 l/s to 2100 l/s for N2.

The new 5-axis active magnetic bearing and drive system combines high reliability and efficient operation.

Highlights

• Maintenance-free operation in most applications
• Hydrocarbon free
• Extremely low vibration
• Particulate and corrosive gas resistant
• Monitoring of performance data
• Self-protection incase of exceeding operation limits or malfunction 
• Fully integrated converter and power supply eliminate the need for a conventional rack-mounted controller and interconnecting cables
• Flexible design with controller position on the side or bottom for easy system integration
• Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements
• High robustness in industrial environment due to protective class IP 54 required in PVD, display, solar and optical coating applications