The MKS Vacuum Transducer MicroPirani-Absolute Piezo combines advanced MicroPirani and absolute piezoelectric technologies to deliver wide-range, accurate pressure measurement in vacuum systems. Designed for applications requiring high precision and compact integration, it features an NW16 ISO-KF flange fitting and a RS485 digital interface for setup and real-time monitoring.
Product Features
- Dual sensor technology with MicroPirani and absolute Piezo for superior accuracy and stability
- Wide pressure measurement range from 1x10^-5 Torr up to 1500 Torr
- Gas-independent absolute pressure measurement from 11 to 1500 Torr
- Piezo sensor directly measures absolute pressure below 1 Torr up to 1500 Torr
- MicroPirani element built from a 1 mm² silicon chip for precise low volume measurements
- Minimized convection effects allow mounting in any orientation without losing accuracy
- RS485 digital communication interface for easy parameter setup and live data monitoring
- Analog pressure output of 1 VDC/decade compatible with external equipment
- Selectable analog outputs and pressure curves via digital user interface
- Three mechanical relays for process control tasks such as pump and valve interlocking
- Compact design reduces footprint for more efficient system integration
- Improved response time and repeatability over conventional thermal conductivity gauges
Benefits
- Accurate and stable pressure readings across a wide range, from high vacuum to atmospheric pressure
- Compact form factor saves valuable space in vacuum system designs
- Gas-independent measurement provides reliable and repeatable results regardless of gas type
- Fast response supports precise process monitoring and control
- Digital and analog outputs enable flexible system integration and real-time data access
- Integrated mechanical relays enhance process safety and automation
Why Choose the MKS Vacuum Transducer MicroPirani-Absolute Piezo?
The MKS Vacuum Transducer MicroPirani-Absolute Piezo is engineered for demanding applications that require fast, stable, and accurate pressure measurements across a broad vacuum range. Its unique combination of MicroPirani and piezoelectric technologies delivers gas-independent measurement, excellent repeatability, and low-end detection down to 10^-5 Torr—all in a compact, space-saving design with flexible communication and control options.
