The MKS Vacuum Gauge Micro-Ion Plus combines industry-standard Micro-Ion ionization vacuum sensor technology with a miniature Pirani Conductron heat-loss sensor in a compact module. Designed for accurate, continuous pressure measurement from high vacuum to atmosphere, it features a 2.75 inch CF flange fitting and EtherCAT communication interface for seamless process integration.
Product Features
- Compact modular design with 2.75 inch CF flange for easy installation
- Combines Micro-Ion ionization and Pirani Conductron sensors for full range pressure measurement
- EtherCAT communication interface enables configurable settings and remote monitoring
- Two set point control relays simplify process automation and control
- Single analog output for full range pressure measurement reduces cabling complexity
Benefits
- Accurate, continuous pressure measurement across a wide range from high vacuum to atmosphere
- Reduces the number of gauges, vacuum interfaces, and cabling required, saving space and installation effort
- EtherCAT interface facilitates integration with advanced control systems
- Integrated relays allow for automated process control and enhanced operational efficiency
Why Choose the MKS Vacuum Gauge Micro-Ion Plus 2.75 in. CF Flange, EtherCAT Interface, 2 Relays?
The MKS Vacuum Gauge Micro-Ion Plus offers a reliable and space-saving solution for comprehensive vacuum pressure measurement. Its dual sensor design and EtherCAT interface deliver precise data and simplify process control with the added benefit of two relay outputs for enhanced automation.
