The MKS RF Plasma Generator delivers 750 Watts of power at 13.56 MHz within a compact air-cooled full rack housing. Equipped with DeviceNet, 25-pin analog, and RS232 interfaces, this generator offers state-of-the-art technology optimized for reliability and superior output performance. Featuring a high-speed closed loop control, a class E RF deck, and a switching modulator, it achieves precise plasma generation ideal for demanding semiconductor, solar, LED, and MEMs applications.
Product Features
- 750 Watts power output at 13.56 MHz frequency
- Compact air-cooled full rack housing for efficient heat management
- Interfaces include DeviceNet, 25-pin analog, and RS232 for versatile communication
- High-speed closed loop control and class E RF deck for superior output performance
- Switching modulator enhances power efficiency and reliability
- Single printed circuit board assembly virtually eliminates internal wires and connectors
- Designed for continuous operation or stand-alone batch tools
- Ideal for solar, LED, MEMs, and semiconductor manufacturing applications
Benefits
- High reliability with reduced internal wiring for minimized failure points
- Efficient cooling system ensures stable operation under demanding conditions
- Versatile communication interfaces support integration with various control systems
- Compact full rack design saves valuable lab and production space
- Advanced control technology delivers precise plasma generation for quality processing
Why Choose the MKS RF Plasma Generator 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack?
The MKS RF Plasma Generator combines advanced technology with robust design to deliver reliable, precise plasma generation in a compact package. Its multiple interface options and superior control systems make it the ideal choice for high-tech manufacturing environments requiring continuous or batch plasma processes.
