The MKS RF Plasma Generator delivers 600 Watts of power at 13.56 MHz in a compact, air-cooled half rack housing. Equipped with DeviceNet, 25-pin analog, and RS232 interfaces, this plasma generator features advanced technology for superior performance and reliability in demanding industrial applications.
Product Features
- 600 Watts power output at 13.56 MHz frequency for consistent plasma generation
- Compact air-cooled half rack design for efficient space utilization
- DeviceNet, 25-pin analog, and RS232 communication interfaces for versatile control options
- High-speed closed loop control system for precise power regulation
- Class E RF deck and switching modulator ensure superior output performance
- Single printed circuit board assembly reduces internal wiring, enhancing reliability
- Suitable for continuous operation or stand-alone batch tools
- Ideal for Solar, LED, MEMs, and semiconductor manufacturing applications
Benefits
- Reliable and stable plasma power output ensures consistent process quality
- Compact half rack design saves valuable lab or production space
- Multiple communication interfaces provide flexible integration with control systems
- Reduced internal wiring minimizes potential points of failure and simplifies maintenance
- High-speed closed loop control adapts quickly to process variations for optimal performance
- Air-cooled design eliminates the need for additional cooling infrastructure, reducing operating costs
Why Choose the MKS RF Plasma Generator?
This RF plasma generator combines advanced control technology with a compact and reliable design, making it ideal for high-demand environments such as semiconductor fabrication, solar cell production, and LED manufacturing. Its robust construction and versatile interfaces ensure seamless integration and long-term dependable operation, supporting both continuous and batch plasma processes with precision.
