The MKS Piezo Vacuum Transducer offers precise absolute pressure measurement from 0.1 to 1000 Torr using a MEMS-based piezo resistive sensor with a robust stainless steel 316 diaphragm. Designed for versatility, it features a NW16 ISO-KF fitting, RS485 digital communication for parameter setup and real-time measurement, and a 16-bit 0–10 VDC analog output (linear at 10 mV/Torr) compatible with external control equipment. Backward compatibility is ensured via a male DB9 connector. The integrated SPDT relay provides process control by energizing above or below set points, enabling interlock functions or pressure warnings. Compact and gas type independent, this transducer is ideal for semiconductor manufacturing, thin film coating, freeze-drying, analytical instrumentation, and more.
Product Features
- Measurement range: 0.1–1000 Torr Full Scale
- MEMS-based piezo resistive sensor with stainless steel 316 diaphragm
- NW16 ISO-KF vacuum flange fitting for easy integration
- RS485 digital communication for real-time monitoring and configuration
- 16-bit 0–10 VDC analog output linear at 10 mV/Torr
- Male DB9 connector for backward compatibility with first generation devices
- One mechanical SPDT relay with normally open and closed contacts for process control
- Compact design saves space in system installations
- Gas type independent absolute pressure measurement
- Accuracy: ±1% of reading from 10–1000 Torr
- Robust construction resistant to mechanical vibration and g-forces
Benefits
- Reliable and accurate absolute pressure measurement independent of gas type
- Flexible integration with digital RS485 and analog 0–10 VDC outputs
- Compact footprint allows installation in tight spaces
- Built-in relay supports safety interlocks and process automation
- Backward compatibility eases upgrades or replacements
- Durable stainless steel construction withstands demanding process environments
- Ideal for applications like semiconductor manufacturing, freeze-drying, and analytical equipment
Why Choose the MKS Piezo Vacuum Transducer 0.1–1000 Torr, NW16 ISO-KF, RS485, 0–10 VDC, DB9, 1 Relay?
Combining high accuracy, robust MEMS-based technology, and flexible I/O, the MKS Piezo Vacuum Transducer is engineered for precision and reliability. Its gas type independent design, integrated relay for control, and compact form factor make it the perfect choice for modern vacuum systems in research, industrial, and production environments.
