The MKS 835 VQM is a cutting-edge mass spectrometer designed for precise gas analysis in vacuum chambers, operating from UHV to 10⁻⁵ Torr. Its differential pump system enhances performance at higher pressures, providing fast, reliable measurement of partial and total pressures for superior vacuum quality monitoring.
Product Features
- Operates from UHV to 10⁻⁵ Torr with accurate gas measurement
- Differential Pump System enables operation at higher pressures
- Autoresonant ion trap mass spectrometer gauge paired with VQM Controller and Viewer software
- Ratiometric measurement determines gas ratios within the vacuum chamber
- World’s fastest, lowest power mass spectrometer with full data collection and spectral deconvolution
- Data logging at 85 ms capture rates for 1-145 amu or 125 ms for 1-300 amu measurement ranges
- Smaller size, easier calibration, 20 times faster, and 80% less power than traditional quadrupole RGAs
- Accurate low amu gas measurement including hydrogen and helium without zero blast
- Instant access to critical measurements including top 10 prevalent gases, total and partial pressure trend graphs
- Low power consumption of only 15 watts
- Compact design with remotely mounted gauge using cables from 1 to 20 meters
- Easy single-gas calibration using gases already in your vacuum system
Benefits
- Rapid, accurate vacuum gas analysis enhances process control and reliability
- Low power and compact size reduce operational costs and space requirements
- Simple calibration and ratiometric measurement simplify use and increase data confidence
- Remote mounting flexibility for easier installation and maintenance
Why Choose the MKS MOD 485/ANA 2SP?
The MKS 835 VQM mass spectrometer system delivers unprecedented speed, accuracy, and efficiency for vacuum gas analysis. Its advanced technology and smart design make it ideal for laboratories and production facilities requiring precise and reliable vacuum quality monitoring.
