The MKS G-Series GE50A Mass Flow Controller is a high-performance, digitally-controlled MFC designed for fast, accurate, and repeatable gas flow control. Engineered to handle argon at flow rates up to 20,000 SCCM, it integrates advanced MKS control algorithms and digital calibration for superior accuracy and stability. With a wide selection of digital and analog I/O options and robust sealing choices, it’s ideal for demanding industrial and laboratory applications.
Product Features
- Handles flow rates from 5 to 50,000 SCCM, configured here for 20K SCCM argon
- Digital control electronics with MKS algorithms for quick response and precise flow regulation
- Typical response time of around 500 milliseconds
- Seal and valve plug options include Viton, Buna, Neoprene, and Kalrez for compatibility with different gases and processes
- Wide choice of digital I/O: EtherCAT, DeviceNet, Profibus, PROFINET, RS485, plus analog options (0-5 VDC or 4-20 mA)
- Standard closed conductance leak rate of less than 0.1% of Full Scale
- Settling time under 750 milliseconds for stable process control
- Digital calibration achieving 1% of set point accuracy on the calibration gas
Benefits
- Fast, reliable, and repeatable flow control enhances process efficiency
- Flexible sealing options adapt to various chemical environments and applications
- Digital and analog connectivity simplifies integration with different systems
- Quick response and stable operation reduce cycle times and improve throughput
- Accurate digital calibration supports consistent process performance
Why Choose the MKS MFC, AR, 20K SCCM, EtherCAT, N.C. Viton, LCEA24CS18V20?
The MKS GE50A MFC is the ideal solution for high-flow argon applications requiring fast response, precision, and flexibility. Its advanced digital control, multiple sealing options, and comprehensive I/O connectivity deliver reliable performance across a wide range of processes, from laboratory R&D to demanding industrial environments.
