The MKS GE50A mass flow controller is a general purpose, multi-gas, multi-range device designed for precise flow control of nitrogen at rates up to 10 sccm. Featuring RS485 digital communication via a 9 pin connector, it offers fast and repeatable response times of around 500 milliseconds. Built on advanced MKS control algorithms, it ensures 1% of setpoint accuracy on the calibration gas. Its compact 3-inch footprint makes integration easy without modifying existing gas line setups. All wetted surfaces are metal, and it comes standard with Viton seals, with optional Buna, Neoprene or Kalrez available to match specific gas requirements.
Product Features
- Digitally controlled mass flow controller for nitrogen at 10 sccm
- Supports RS485, Profibus, EtherCAT, or DeviceNet interfaces
- Fast 500 ms response time with precise digital calibration
- Standard 3-inch footprint simplifies retrofits and system upgrades
- Few elastomer components; all wetted surfaces are metal
- Viton seals as standard for broad chemical compatibility
- Easy replacement for MKS 1179A RS485 and DeviceNet models with minimal coding changes
Benefits
- Patented thermal sensor design ensures exceptional zero stability
- Percent of setpoint accuracy for tighter process control and consistency
- Embedded user interface enables simple configuration and real-time monitoring
- Compact design saves space and fits seamlessly into existing systems
- Versatile connectivity supports integration into diverse process environments
Why Choose the MKS GE50A Mass Flow Controller Nitrogen 10 sccm?
Engineered for precision and reliability, the MKS GE50A delivers accurate flow control with minimal integration effort. Its fast response, robust construction, and compatibility with various communication protocols make it an excellent choice for labs and industrial applications that demand consistent performance and flexibility.
