The MKS Mass Flow Controller is a reliable general-purpose device designed to measure and control gas flow rates up to 100 sccm (N2 equivalent). Featuring a durable Viton seal and a standard 0.25 inch tube connection, this controller provides excellent compatibility for various applications. It includes a 15-pin D-sub electrical connector for easy integration with MKS or third-party power supply and display electronics. The controller can also function as a pressure controller when paired with a suitable pressure transducer.
Product Features
- Full scale flow rate of 100 sccm (N2 equivalent)
- Viton elastomer seal for chemical resistance and durability
- Standard 0.25 inch tube connection for seamless system integration
- 15-pin D-sub electrical connector for reliable communication
- Compatible with MKS and third-party MFC power supply and display electronics
- Can be configured as a pressure controller with appropriate pressure transducer
Benefits
- Accurate and repeatable gas flow control for consistent process results
- Long-lasting Viton seal enhances chemical compatibility and lifespan
- Standardized tube and connector sizes simplify installation and maintenance
- Flexible operation modes support both flow and pressure control needs
- Broad compatibility with electronics increases system versatility
Why Choose the MKS Mass Flow Controller 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal?
Designed for precision and flexibility, the MKS Mass Flow Controller delivers dependable flow measurement and control in diverse environments. Its robust design, standard connectivity, and dual flow/pressure control capabilities make it an excellent choice for many industrial and research applications.
