The MKS Loadlock Vacuum Transducer MicroPirani-Piezo with display combines advanced Piezo and MicroPirani sensor technologies to deliver highly accurate, stable, and repeatable pressure measurements across a wide range from atmosphere to 10^-5 Torr. Designed specifically for vacuum loadlock applications, it features an NW16 ISO-KF flange, RS485 digital interface, and compact design that helps improve loadlock cycle times and process performance.
Product Features
- Combines Piezo and MicroPirani technologies for superior accuracy, stability, and fast response time
- Wide pressure measurement range from 0.00001 to 1000 Torr with atmospheric switching capability
- Gas-independent absolute pressure measurement from 50 to 1000 Torr
- MicroPirani sensor element built from a 1 mm² silicon chip enables precise measurement in very small volumes
- Reads pressures two decades lower than standard Pirani sensors (down to 10^-5 Torr)
- Minimized convection effects allow mounting in any orientation without compromising accuracy
- Digital display for real-time local pressure readout
- RS485 digital communication interface for setup and live monitoring
- Analog pressure output of 1 VDC/decade compatible with external equipment
- Selectable analog outputs and curves via digital interface; optional secondary analog output for differential pressure
- Up to three mechanical relays for process control, interlocking vacuum pumps and isolation valves
- Each set point assignable to differential piezo measurement or combined absolute MicroPirani/Piezo measurement
- Compact design reduces system footprint, saving valuable space in loadlock configurations
Benefits
- Highly accurate gas-independent pressure measurement improves process reliability and repeatability
- Wide measurement range supports monitoring from atmospheric pressure to high vacuum
- Compact size helps streamline loadlock system design and integration
- Fast response times enable shorter loadlock cycle times and improved throughput
- Built-in relays automate safety and process interlocks, enhancing system performance
- Digital and analog outputs provide flexibility for monitoring, control, and system integration
Why Choose the MKS Loadlock Vacuum Transducer MicroPirani-Piezo?
Specifically engineered for vacuum loadlock applications, the MKS Loadlock Vacuum Transducer MicroPirani-Piezo combines absolute and differential pressure measurement technologies with a wide dynamic range, gas-independent accuracy, and fast response time. Its compact design, RS485 communication, real-time display, and flexible process control options make it the ideal choice for modern vacuum systems that demand precision, reliability, and efficiency.
