The MKS 835 VQM is a high-precision mass spectrometer designed to operate in ultra-high vacuum (UHV) environments down to 10⁻⁵ Torr. It accurately measures the composition of gases within a vacuum chamber, providing critical data for vacuum quality analysis. The 835 VQM Differential Pump System extends the capabilities of the 835 VQM to higher pressure ranges. This system includes an autoresonant ion trap mass spectrometer gauge, a VQM Controller, and VQM Viewer software that converts raw measurement data into actionable information for users.
Product Features
- Operates in ultra-high vacuum conditions from UHV to 10⁻⁵ Torr
- Accurate measurement of gases in vacuum chambers for precise monitoring
- Includes a differential pump system for enhanced performance at higher pressures
- Autoresonant ion trap mass spectrometer gauge for reliable detection
- VQM Controller for device management and control
- VQM Viewer software converts raw data into easy-to-understand actionable insights
- Ratiometric measurement capability calculates gas ratios within vacuum chambers
- Typically used in combination with total pressure gauges to assess vacuum quality
Benefits
- Enables precise gas composition analysis for superior vacuum process control
- Provides comprehensive vacuum quality assessment by measuring partial gas pressures
- Ratiometric data output enhances understanding of gas interactions in vacuum systems
- User-friendly software simplifies interpretation of complex mass spectrometer data
- Improves reliability and performance of vacuum systems across a range of pressures
Why Choose the MKS KIT 835 & 830 FRU Pack Assembly?
This kit offers a complete solution for advanced vacuum gas analysis, combining state-of-the-art mass spectrometry with intuitive control and data visualization tools. It is ideal for applications demanding precise vacuum monitoring and gas composition measurement, ensuring optimal system performance and process reliability.
