The MKS GE50A Mass Flow Controller (MFC) is a general purpose, elastomer sealed device designed for precise flow control ranging from 5 sccm to 50 slm full scale, N2 equivalent. Featuring advanced digital flow control electronics and a patented thermal sensor, the GE50A delivers exceptional zero stability and fast, repeatable response.
Product Features
- Patented thermal sensor design for exceptional zero stability
- Percent of set point accuracy on calibration gas enables precise process control
- Embedded user interface for easy device range and gas changes, reducing inventory needs
- Ability to monitor device functionality and collect performance data in-situ
- Wide choice of digital I/O including EtherCAT, DeviceNet, Profibus, and RS485
- Analog I/O options: 0 to 5 VDC or 4 to 20 mA
- CE Mark and RoHS Compliance for European market requirements
- Elastomer sealed with Viton, normally closed valve
- Swagelok 1/4" connection for easy integration
Benefits
- High precision flow control ensures reliable process performance
- Flexible communication interfaces simplify integration into existing systems
- User-friendly interface reduces downtime and inventory complexity
- Compliance with global standards supports international use
- Durable elastomer seals provide long service life with Viton compatibility
Why Choose the MKS GE50A MFC Nitrogen 500sccm?
The MKS GE50A MFC combines proven thermal sensor technology with advanced digital control for reliable and accurate flow measurement. Its versatility in communication options, ease of use, and compliance with international standards make it an ideal choice for a wide range of applications requiring precise nitrogen flow control.
