The MKS GE50A Mass Flow Controller offers digitally-controlled precision flow management for nitrogen gas with fast and repeatable response times. Featuring the latest MKS control algorithms, this controller supports RS485, Profibus, EtherCAT, PROFINET, and DeviceNet digital interfaces, as well as analog output options for versatile integration. Typical response times are approximately 500 milliseconds, with digital calibration ensuring 1% of set point accuracy on calibration gas.
Product Features
- Flow rates from 5 to 50,000 sccm suitable for varied applications
- Seal and valve plug options include Viton, Buna, Neoprene, or Kalrez for chemical compatibility
- Wide choice of digital interfaces: EtherCAT, DeviceNet, Profibus, PROFINET, and RS485
- Analog output options of 0-5 VDC or 4-20 mA for flexible control system integration
- Standard closed conductance leak rate of less than 0.1% of full scale for minimal gas loss
- Fast settling time under 750 milliseconds for responsive and stable control
- Advanced digital control electronics utilizing the latest MKS algorithms
- Digital calibration delivering 1% accuracy on the calibration gas
Benefits
- Highly accurate and repeatable nitrogen gas flow control across a broad range
- Robust sealing and valve materials offer chemical resistance and durability
- Multiple communication protocols support easy integration in diverse control systems
- Quick response times improve process efficiency and reliability
- Low leak rate reduces gas consumption and contamination risk
Why Choose the MKS GE50A MFC 500 SCCM N2?
The MKS GE50A MFC provides precise, reliable nitrogen flow control with advanced digital electronics and multiple interface options. Its fast response and durable design make it ideal for demanding industrial and research applications.
