The MKS GE50A Mass Flow Controller (MFC) is a digitally-controlled device designed for precise hydrogen (H2) gas flow management up to 50 sccm. Equipped with a 15-pin analog interface and normally closed valve configuration with Viton seals, it offers fast, accurate, and reliable flow control. The controller integrates advanced MKS algorithms for quick response and repeatability across the entire control range, supporting a variety of digital and analog I/O protocols to suit complex system requirements.
Product Features
- Digitally-controlled electronics ensure fast and repeatable response to set points
- Flow range from 5 to 50,000 sccm, specifically configured here for 50 sccm hydrogen flow
- Seal and valve plug options include Viton, Buna, Neoprene, and Kalrez for chemical compatibility
- Supports multiple digital I/O protocols: EtherCAT, DeviceNet, Profibus, PROFINET, and RS485
- Analog I/O options: 0–5 VDC or 4–20 mA for flexible integration
- Standard closed conductance leak rate less than 0.1% of full scale, ensuring safety
- Typical response time of ~500 milliseconds and settling time under 750 milliseconds
- Normally closed valve with Viton seals and 15-pin analog connectivity
Benefits
- Provides fast, precise hydrogen flow control for improved process accuracy
- Wide communication protocol support facilitates seamless system integration
- Low leak rate minimizes risk of contamination and enhances safety
- Digital calibration guarantees consistent long-term performance
- Robust and reliable for industrial, semiconductor, and laboratory applications
Why Choose the MKS GE50A MFC H2, 50 SCCM, 15 PIN ANALOG, Normally Closed, Viton Seals?
The MKS GE50A MFC is engineered for high precision hydrogen flow control with fast response and flexible communication options. Its durable Viton seals and normally closed valve design make it ideal for critical applications demanding reliability and accuracy.
