The MKS GE50A digitally-controlled mass flow controller offers precise control of nitric oxide (NO) flow up to 5,000 sccm. Utilizing advanced MKS control algorithms, it delivers fast, repeatable response with typical settling times under 750 milliseconds. The controller supports various communication interfaces including RS485, Profibus, EtherCAT, PROFINET, DeviceNet, and analog I/O (0-5 VDC or 4-20 mA). Featuring Viton seals and normally closed valve design, it ensures excellent chemical compatibility and system integrity with a leak rate under 0.1% of full scale.
Product Features
- Flow control range from 5 to 50,000 sccm for broad application versatility
- Seal and valve plug options including Viton, Buna, Neoprene, and Kalrez
- Multiple digital communication protocols: RS485, Profibus, EtherCAT, PROFINET, DeviceNet
- Analog I/O options: 0-5 VDC and 4-20 mA for flexible system integration
- Standard closed conductance leak rate less than 0.1% of full scale
- Fast response with settling times typically under 750 milliseconds
- Digital calibration provides 1% set point accuracy on calibration gas
Benefits
- Accurate and stable NO flow control for sensitive applications
- Fast response enhances process control and reduces downtime
- Wide communication options enable seamless integration into control systems
- Durable seals and valve design ensure chemical resistance and system reliability
- Low leak rate maintains system purity and safety
Why Choose the MKS GE50A NO Mass Flow Controller 5K SCCM, 15 Pin Analog, Normally Closed Viton?
The MKS GE50A NO mass flow controller combines precision digital control, fast response, and robust construction with versatile communication options, making it ideal for critical nitric oxide flow management in industrial and research environments.
