The MKS GE50A Mass Flow Controller is a high-precision, digitally controlled device designed for accurate Argon gas flow measurement up to 200 SCCM. Utilizing advanced MKS digital control algorithms, it delivers fast and repeatable responses to set point changes, ensuring reliable flow control for demanding applications.
Product Features
- Designed for Argon gas with a full scale flow range of 200 SCCM
- RS485 digital interface for seamless system integration
- Seal material: Viton for enhanced chemical compatibility
- Normally closed valve configuration for safety and process control
- 1/4" Swagelok fittings for secure, leak-tight connections
- Flow rates supported from 5 to 50,000 SCCM to cover a wide range of applications
- Seal and valve plug options available in Viton, Buna, Neoprene, or Kalrez
- Wide choice of digital (EtherCAT, DeviceNet, Profibus, PROFINET, RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Digital calibration with 1% of set point accuracy on calibration gas
- Standard closed conductance leak rate of less than 0.1% of full scale
- Typical response times around 500 milliseconds with settling time under 750 milliseconds
Benefits
- High accuracy and repeatability for precise process control
- Fast response ensures stable system performance and efficient operation
- Flexible communication options support integration into digital or analog control systems
- Durable construction and chemical-resistant seals for longer service life
- Wide flow range capability makes it versatile for various applications
Why Choose the MKS GE50A Mass Flow Controller AR 200 SCCM RS485 N.C. Viton LCEA22CS15V20?
The MKS GE50A Mass Flow Controller combines speed, precision, and robust design to deliver reliable gas flow control for Argon applications. Its advanced digital architecture, wide I/O support, and compact form factor make it ideal for industrial and laboratory environments where performance and integration flexibility are essential.
