The MKS 835 VQM is a mass spectrometer that operates from ultra-high vacuum (UHV) to 10-5 Torr, accurately measuring gases in vacuum chambers. The 835 VQM Differential Pump System extends the benefits of the 835 VQM at higher pressures. This system includes an autoresonant ion trap mass spectrometer gauge, a VQM Controller, and VQM Viewer software that converts raw data into actionable information. It features ratiometric measurement, determining gas ratios within the vacuum chamber and is typically used alongside a total pressure gauge to provide partial pressure data indicating vacuum quality.
Product Features
- Operates from UHV to 10-5 Torr for accurate gas measurement
- Fastest, lowest power mass spectrometer with full data collection and spectral deconvolution
- Data logging at 85 ms capture rates for 1-145 amu or 125 ms for 1-300 amu measurement range
- Instant access to critical data including 10 most prevalent gases in normalized, percentage, and absolute values
- Provides total pressure and partial pressure trend graphs for process monitoring
- Accurate hydrogen and helium measurement with no zero blast
- Easy single-gas calibration using gases already in the vacuum system
- Low power consumption at only 15 watts
- Compact design with remotely mounted gauge connected via cable lengths from 1 to 20 meters
- Compared to traditional quadrupole residual gas analyzers: smaller, easier to calibrate, 20 times faster, and uses 80% less power
- Accurately represents low amu gases for improved vacuum monitoring
Benefits
- Enables precise, real-time vacuum gas analysis for better process control
- Improves system reliability with fast, accurate measurement and low power usage
- Compact and flexible installation options for diverse vacuum system setups
- Provides actionable data to enhance vacuum quality and system diagnostics
Why Choose the MKS VQM Demount Envelope Gauge 2.75CF, 1-300 AMU?
The MKS VQM Demount Envelope Gauge delivers unmatched speed, accuracy, and efficiency in vacuum gas analysis. Its advanced technology, ease of calibration, and low power consumption make it ideal for cutting-edge vacuum quality monitoring applications.
