The MKS 972B Dual Mag Pirani & Cold Cathode Gauge is a compact, multi-sensor vacuum transducer designed for precise and reliable vacuum measurement from 1x10-8 Torr to atmosphere. Combining cold cathode inverted magnetron and MicroPirani MEMS thermal conductivity sensors, it offers extended measurement range and accurate pressure monitoring in demanding vacuum applications. The KF25 flange, RS232 interface, and integrated display make it a practical and versatile solution for modern vacuum systems.
Product Features
- Compact footprint saves valuable tool and system space
- User serviceable design reduces maintenance downtime
- Supports both analog and digital communication for flexible integration
- Cost-effective multi-sensor design combines cold cathode and MicroPirani sensors
- Optional integrated local display for on-site monitoring
Cold cathode inverted magnetron and MicroPirani pressure/vacuum gauge
The dual-sensor technology offers broad measurement capability. The MicroPirani extends the low-end measuring range 1–2 decades lower than traditional Pirani gauges, while the cold cathode inverted magnetron provides accurate measurement at high vacuum levels, ensuring reliable monitoring across a wide pressure spectrum.
Applications
- Analytical equipment including mass spectrometer control
- Scanning electron microscopes
- Coating systems
- General vacuum base pressure measurement
Benefits
- Compact design minimizes installation cost and saves space
- Extended measurement range improves process flexibility and control
- User serviceable design reduces operational downtime and maintenance costs
- Integrated display allows quick local vacuum status checks
- Cost-efficient multi-sensor solution simplifies system design
Why Choose the MKS 972B Dual Mag Pirani & Cold Cathode Gauge?
The MKS 972B Dual Mag Pirani & Cold Cathode Gauge offers reliable, extended-range vacuum measurement in a compact package. Its combination of advanced sensor technology, flexible communication options, and user-friendly maintenance makes it ideal for critical applications in analytical equipment, semiconductor tools, and coating systems.
