946 Vacuum System Controller_1721441
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MKS 946 Vacuum System Controller, Half-Rack, Controls up to 6 Gauges or MFCs, Closed-Loop Pressure Control, RS232/485

The MKS 946 Vacuum System Controller is a versatile half-rack measurement and control system designed to power and simultaneously display readings for up to six vacuum gauges and/or mass flow controllers. Supporting a wide range of sensor technologies, including Baratron capacitance manometers, cold cathode, hot cathode, standard Pirani, and convection Pirani sensors, the 946 delivers accurate measurements from ultra-high vacuum to above atmospheric pressure. With standard RS232/485 computer interfaces and options for closed-loop pressure control, it seamlessly integrates into complex vacuum systems for precise monitoring and control.

Product Features

  • Simultaneous control and display of up to six vacuum gauges and/or mass flow controllers
  • Wide measurement range from 10,000 Torr down to 10^-11 Torr
  • Closed-loop pressure control option compatible with MKS valves
  • RS232/485 computer control standard for streamlined system integration
  • Supports diverse sensor technologies including Baratron capacitance manometers, cold cathode, hot cathode, standard Pirani, and convection Pirani sensors
  • Flow ratio control using multiple mass flow controllers
  • Communication between gauges enables a reference sensor to span or zero another gauge

Benefits

  • Flexible system integration – Manage multiple sensor types and mass flow controllers from a single, compact half-rack unit.
  • Broad pressure coverage – Accurately measure pressures across a vast range, ideal for diverse vacuum applications.
  • Advanced process control – Closed-loop pressure control ensures stable and repeatable vacuum conditions.
  • Streamlined communication – Built-in RS232/485 interfaces make integration with existing lab or industrial setups straightforward.
  • Reduced complexity – View and manage up to six devices simultaneously, improving workflow efficiency.
  • Precision calibration – Span or zero gauges using a reference sensor, enhancing measurement accuracy.

Why Choose the MKS 946 Vacuum System Controller?

Engineered for high precision and flexibility, the MKS 946 simplifies complex vacuum system management. Its half-rack design saves valuable rack space while providing powerful control capabilities. Whether monitoring ultra-high vacuum levels or coordinating multiple mass flow controllers, this controller ensures reliable, accurate operation across demanding research, industrial, or production environments.

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