The 946 is a versatile half-rack vacuum gauge measurement and control system. It provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure.
- Simultaneous control and display six vacuum gauges and/or mass flow controllers
- Pressure readings from 10,000 Torr down to 10-11 Torr
- Closed-loop pressure control option for use with MKS valves
- RS232/485 computer control standard in all configurations for ease of system integration
- Flow ratio control using multiple mass flow controllers
- Communication between gauges enables a reference sensor to span or zero another gauge
