The MKS 946 Combination Controller is a versatile half-rack system designed for advanced vacuum gauge measurement and control. Supporting simultaneous power and readout for up to six vacuum gauges and/or mass flow controllers, this controller offers flexible options for pressure control tailored to complex vacuum systems. Compatible with a broad range of sensor technologies including Baratron capacitance manometers, cold cathode, hot cathode, standard Pirani, and convection Pirani sensors, it covers an extensive measurement range from ultra-high vacuum to above atmospheric pressure.
Product Features
- Simultaneous control and display of up to six vacuum gauges and/or mass flow controllers
- Pressure measurement range spanning from 10,000 Torr down to 10⁻¹¹ Torr
- Optional closed-loop pressure control compatible with MKS valves for precise process regulation
- Standard RS232/485 computer control interfaces for seamless system integration
- Flow ratio control capability when using multiple mass flow controllers
- Inter-gauge communication allowing a reference sensor to span or zero another gauge, enhancing measurement accuracy
- EU voltage configuration with flexible slot assignments: Slot A and Slot B configured as Dual Mass Flow Controllers; Slot C and Valve Slot left blank
Benefits
- Comprehensive vacuum system management with simultaneous multi-gauge and mass flow controller operation
- Wide measurement range supports diverse vacuum applications from ultra-high vacuum to atmospheric pressure
- Enhanced process control through closed-loop valve integration
- Ease of integration into automated systems via industry-standard communication protocols
- Improved accuracy with inter-gauge communication and flow ratio control
- Modular design allows tailored configurations to meet specific application needs
Why Choose the MKS 946 Combination Controller?
The MKS 946 Combination Controller is engineered for users demanding robust, flexible, and precise vacuum measurement and control. Its ability to manage multiple gauges and mass flow controllers simultaneously, combined with extensive sensor compatibility and advanced control options, makes it ideal for complex vacuum systems in research and industrial environments. With reliable communication protocols and modular slot configurations, the 946 controller delivers unparalleled control, integration ease, and measurement accuracy.
