The MKS 901P 4VCR-F Loadlock Transducer Vacuum Sensor combines advanced Piezo and MicroPirani™ vacuum sensor technologies into a single compact unit designed specifically for vacuum load lock environments. Offering a wide measurement range from 1.0x10-5 to 1000 Torr with atmospheric switching capability, this modular transducer delivers superior accuracy, stability, repeatability, and fast response times compared to conventional thermal conductivity gauges. Its ultra-compact design reduces installation costs and optimizes space in critical control setups.
Product Features
- 3-sensor functionality combined in one transducer for an extended measurement range
- Ultra-compact design significantly saves installation space and costs
- Setup, diagnostic, and operation software available for easy configuration and monitoring
- Optional analog outputs and electrical connectors compatible with other vendors’ gauges for straightforward upgrades
- Three optional setpoints to customize control and alarms
- Optional local display for convenient onsite pressure monitoring
Benefits
- Enhanced accuracy and stability for reliable vacuum and pressure measurement
- Faster response time compared to conventional thermal conductivity gauges
- Compact footprint ideal for load lock environments with limited space
- Flexible installation options with VCR compatible parts
- Easy integration and upgradeability due to optional connector compatibility
Applications
- Designed specifically for vacuum and pressure measurement in vacuum load locks
- Widely used in semiconductor, research, and industrial vacuum systems
- Utilizes VCR compatible parts (VCR is a registered trademark of Swagelok Company)
Why Choose the MKS 901P?
The MKS 901P 4VCR-F Loadlock Transducer Vacuum Sensor is the ideal choice for demanding vacuum load lock applications that require precise, reliable pressure measurement across a broad range. Its combined sensor technology, compact design, and versatile setup options provide superior performance, lower installation costs, and easy integration, making it a trusted solution for modern vacuum systems.
