The MKS 631F Heated Absolute Baratron Capacitance Manometer operates at high internal temperatures of 150°C or 200°C to minimize process byproduct deposition and reduce output drift caused by contamination. Ideal for demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD), it delivers precise and reliable absolute pressure measurements.
Product Features
- Operating temperatures of 150°C or 200°C reduce sensor contamination and output drift
- 0 to 10 VDC analog output proportional to absolute pressure for accurate monitoring
- Two optional pressure trip relays enable control of external equipment
- Corrosion-resistant Inconel sensor ensures durability in harsh environments
- Performance remains stable despite pressure bursts
- Compact design with self-contained electronics saves valuable system space
Benefits
- Maintains measurement accuracy by minimizing contamination effects
- Enables precise control in advanced semiconductor vacuum processes
- Robust sensor materials extend service life and reduce maintenance needs
- Optional trip relays enhance system automation and safety
- Compact footprint facilitates integration into tight spaces
Why Choose the MKS 631F XDCR, 1 mbar, 2 Inch Tri-Clamp, 0.50%, 150°C Heated Absolute Baratron Capacitance Manometer?
The MKS 631F combines high-temperature operation with precise pressure measurement to meet the stringent demands of semiconductor manufacturing. Its corrosion-resistant sensor and optional control features make it a reliable choice for maintaining process stability and efficiency.
