The MKS 148J All-Metal Upstream Flow Control Valve is designed for precise, reliable gas flow control in critical semiconductor and high-purity applications. With a full-scale range of 5,000 sccm of Nitrogen and a Swagelok 4 VCR male fitting, this valve minimizes particle generation and reduces outgassing of residual contaminants, helping to prevent device failures and improve yields. All-metal seals deliver an exceptionally low external leak rate of <1 x 10-10 atm cc/sec (He), providing robust resistance against contamination and corrosion. Engineered for durability, the 148J valve supports process temperatures up to 150°C.
Product Features
- Upstream flow control valve with full-scale 5,000 sccm Nitrogen capacity
- All-metal construction and metal seals for superior purity and durability
- External leak rate <1 x 10-10 atm cc/sec (He)
- Swagelok 4 VCR male fitting ensures secure, high-integrity connections
- Designed to operate at process temperatures up to 150°C
- Minimizes particle generation and reduces outgassing of residual contaminants
Benefits
- Maintains ultra-high purity conditions critical for semiconductor and high-vacuum processes
- Reduced risk of device failures and improved production yields
- Exceptional resistance to contamination and corrosion extends service life
- High leak integrity enhances system reliability and performance
- Compact design with robust metal sealing ensures easy integration into demanding applications
Why Choose the MKS 148J?
The MKS 148J combines advanced all-metal construction, high-temperature capability, and industry-leading leak integrity to deliver reliable flow control in the most demanding environments. It is engineered to reduce particle generation and outgassing, making it the ideal choice for semiconductor fabs and other critical applications requiring uncompromising purity and performance.
