Leybold Turbovac MAGiNTEGRA turbo vacuum pumps feature magnetically levitated turbomolecular technology with integrated control electronics, eliminating the need for external rack-mounted controllers and cables. Pumping speeds range from 300 to 2100 l/s for nitrogen, ensuring precision, reliability, and efficient pump down times. The advanced 5-axis active magnetic bearing and drive system delivers high reliability and performance for demanding vacuum applications.
Product Features
- TURBOVAC MAGiNTEGRA – Magnetically Levitated Turbo Vacuum Pumps with Integrated Control Electronics
- Oerlikon Leybold launched the first commercially available MagLev Turbo pump in 1975
- Over 150 patents demonstrating industry-leading innovation
- Accuracy, precision, and reliability characterize these magnetically levitated turbomolecular pumps
- High pumping speed and gas throughput enable faster pump down times, improving equipment cycle times
- Fully integrated converter and power supply eliminate the need for conventional rack-mounted controllers and interconnecting cables
- Pumping speeds range from 300 l/s to 2100 l/s for nitrogen (N2)
- New 5-axis active magnetic bearing and drive system combines high reliability and efficient operation
- Maintenance-free operation in most applications
- Hydrocarbon free
- Extremely low vibration
- Particulate and corrosive gas resistant
- Monitoring of performance data
- Self-protection in case of exceeding operation limits or malfunction
- Flexible design with controller position on the side or bottom for easy system integration
- Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements
- High robustness in industrial environment due to protective class IP54 required in PVD, display, solar, and optical coating applications
Benefits
- Compact design simplifies installation
- Reliable, maintenance-free operation reduces downtime
- Hydrocarbon-free pumping protects sensitive processes
- Low vibration safeguards delicate equipment
- Real-time monitoring optimizes performance and safety
- Durable design suited for harsh industrial conditions
Why Choose Leybold Turbovac MAGiNTEGRA?
The Leybold Turbovac MAGiNTEGRA MAG W 600 iP DN 160 CF turbo vacuum pump offers integrated control electronics and advanced magnetic levitation technology, making it ideal for semiconductor manufacturing, solar, and optical coating applications demanding high performance and reliability.
