Leybold Turbovac MAGiNTEGRA turbo vacuum pumps provide magnetically levitated turbomolecular technology with fully integrated control electronics, eliminating the need for conventional rack-mounted controllers and interconnecting cables. With pumping speeds ranging from 300 to 2100 l/s for nitrogen, these pumps deliver high precision, reliability, and efficiency for demanding vacuum applications. The advanced 5-axis active magnetic bearing and drive system ensures long-lasting, maintenance-free operation.
Product Features
- Magnetically levitated turbomolecular pump with integrated converter and power supply
- Eliminates need for external rack-mounted controllers and cables
- Pumping speeds from 300 to 2100 l/s for N2
- Developed by Oerlikon Leybold, pioneers of the first commercial MagLev turbo pump in 1975
- More than 150 patents supporting innovation in MAGiNTEGRA range
- 5-axis active magnetic bearing and drive system for enhanced reliability and efficiency
- Accuracy, precision, and reliability in industrial vacuum applications
- High gas throughput for faster pump down and improved equipment cycle times
- Hydrocarbon-free and maintenance-free operation in most applications
- Extremely low vibration levels to protect delicate instruments
- Particulate and corrosive gas resistant design
- Performance data monitoring for optimized operation
- Self-protection in case of exceeding operation limits or malfunction
- Flexible controller position on side or bottom for easy system integration
- Modular and innovative industrial communication solutions for current and future integration needs
- High robustness with IP54 protection class for PVD, solar, display, and optical coating environments
Benefits
- Compact and integrated design simplifies installation
- Reliable, maintenance-free, and hydrocarbon-free operation protects sensitive processes
- Faster pump down times improve process efficiency
- Low vibration protects delicate instruments
- Real-time monitoring and self-protection enhance operational safety
- Flexible installation options suit various system layouts
Why Choose Leybold Turbovac MAGiNTEGRA?
The Leybold Turbovac MAGiNTEGRA combines leading magnetic levitation technology with fully integrated electronics to deliver superior vacuum pumping performance. It is ideal for semiconductor manufacturing, solar technology, optical coatings, and other high-demand industrial applications.
