Leybold Turbovac MAGiNTEGRA turbo vacuum pumps offer magnetically levitated turbomolecular technology combined with fully integrated control electronics, eliminating the need for conventional rack-mounted controllers and interconnecting cables. Featuring advanced 5-axis active magnetic bearings, these pumps provide high reliability, precision, and efficiency with pumping speeds from 300 to 2100 l/s for nitrogen.
Product Features
- Magnetically levitated turbomolecular pump with integrated converter and power supply
- Eliminates the need for conventional rack-mounted controllers and cables
- Pumping speeds range from 300 to 2100 l/s for N2
- Developed by Oerlikon Leybold, pioneers of the first commercial MagLev turbo pump in 1975
- Over 150 patents supporting MAGiNTEGRA innovation
- 5-axis active magnetic bearing and drive system for enhanced reliability and efficiency
- Accuracy, precision, and reliability in challenging vacuum applications
- High gas throughput for faster pump down and improved cycle times
- Hydrocarbon-free and maintenance-free operation in most applications
- Extremely low vibration levels to protect sensitive systems
- Particulate and corrosive gas resistant design
- Real-time monitoring of performance data
- Self-protection in case of operational limit exceedance or malfunction
- Flexible controller position on side or bottom for easy integration
- Modular industrial communication interfaces for seamless and future-proof system integration
- High robustness with IP54 protection class suitable for harsh industrial environments, including PVD, solar, and optical coating applications
Benefits
- Compact, integrated design reduces installation complexity
- Maintenance-free and hydrocarbon-free for contamination-sensitive applications
- Fast pump down times improve process throughput
- Low vibration protects sensitive equipment
- Advanced monitoring and self-protection enhance system reliability
- Flexible installation options suit various system configurations
Why Choose Leybold Turbovac MAGiNTEGRA?
The Leybold Turbovac MAGiNTEGRA combines leading magnetic levitation technology with integrated electronics for efficient, reliable vacuum pumping. Its robust design and advanced features make it ideal for semiconductor manufacturing, solar, optical coatings, and other high-demand vacuum processes.
