CMP Orbis Chemical Mechanical Polishing System_1659570
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CMP Orbis Chemical Mechanical Polishing System

Overview

 

CMP Orbis Chemical Mechanical Polishing System with PC driven control system, touch screen interface, twin feed slurry delivery system, wafer carrier head (8" / 200mm diameter capacity) and pad conditioning tool.  System includes the facilities for coefficient of friction monitoring, end point detection and temperature monitoring of the polishing pad, the polishing slurry and the pad/slurry/sample interface 

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