The E28HU5TBF6B e-Baratron Ethernet-Enabled, 100°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 0.05 Torr full scale pressure measurement with 0.5% accuracy, horizontal calibration, and a Swagelok 8 female VCR fitting. It features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. Included heater and temperature status LED/switches indicate that the heater is at the 100°C set point. Updated temperature control electronics to provide superior long-term stability and repeatability.
Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 128, 628, E28 Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
