JMG No. 1031113 • MPN 142AA-00001DB
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141A and 142A Baratron® Vacuum Switches operate on an input voltage of ±15VDC, and offer absolute calibrations from 1 to 1000 Torr (1.33 to 1333 mbar). Their trip points can be customer-adjusted from 0.2 to 100% of the full-scale range. The 141A Baratron® Vacuum Switch operates at ambient temperature, while the 142A operates at 100°C for use in difficult applications where process contamination is likely.
The MKS Instruments 142A Absolute Ambient Pressure/Vacuum Switch offers fast, accurate, and reliable protection for vacuum equipment and processes. The 142 is a heated (100°C) manometer designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A has relay outputs that are easily interfaced with alarms, valve actuators, computers, process controllers, and other protection devices.
The heated 142A helps minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A is deal for protection of expensive equipment or processes such as: high vacuum pumps, mass spectrometers, lasers, plasma systems.
Incoloy® and Iconel® are registered trademarks of Inco Alloys International.
VCR® is a registered trademark of Swagelok® Company.
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1300 501 555
1300 501 555
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