141A 1 Torr Ambirnt Pressure Vacuum Switch

The 142AA-00001DB Heated Absolute Pressure Switch features 1 Torr full scale pressure measurement and a size NW16 ISO-KF fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ''above set point'' indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.

The 142AA-00001DB Heated Absolute Pressure Switch features 1 Torr full scale pressure measurement and a size NW16 ISO-KF fitting. It includes double pole Form C relay contacts that are energized when pressure is below the set point for Fail-safe operation. The 142A is a heated to 100°C, and is designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. Designed for applications where a DC signal output is not required, the 142A provides relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, or other protection devices. Based on the well-known MKS Baratron® capacitance manometer principle of operation, the 142A senses the deflection of a diaphragm due to applied pressure, providing a switched output when pressure exceeds the chosen set point. An LED provides visual ''above set point'' indication, and facilitates adjustment of the set point. The dual electrode sensor is an all-metal, all-welded design, thus exposing only corrosion-resistant Inconel to the process gases.