TURBOVAC MAG W – Magnetically Levitated Turbo Vacuum Pumps

Oerlikon Leybold launched the first commercially available MagLev Turbo pump in 1975. As pioneers in the field, and with over 150 patents, the MAG W range of MagLev turbo vacuum pumps have reaffirmed Oerlikon Leybold’s position as the most respected manufacturer today. 

Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times.

Pumping speeds range from 300 l/s to 3200 l/s for N2.

The new 5-axis active magnetic bearing and drive system combines high reliability and efficient operation.

Highlights

• Maintenance-free operation in most applications 
• Hydrocarbon free
• Extremely low vibration
• Particulate and corrosive gas resistant 
• Monitoring of performance data
• Self-protection incase of exceeding operation limits or malfunction
• Innovative and modular industrial communication solution allows easy integration with customer equipment to meet current and future requirements
• High robustness in industrial environment due to protective class IP 54 required in PVD, display, solar and optical coating applications