High Vacuum Pumps

Leybold offers a broad range of different high and ultra high vacuum pumps. These pumps vary in the principle of operation and field of application: turbomolecular vacuum pumps of the TURBOVAC and MAG series, diffusion vacuum pumps DIP and cryo vacuum pumps of the COOLVAC series. Important items for the selection of the adequate high vacuum pump are: attainable ultimate pressure, required pumping speed, gas throughput or compression.

TURBOVAC / TURBOVAC MAG

Turbomolecular Pumps

Leybold Vacuum offers different product lines of Turbo molecular vacuum pumps which vary in the rotor suspension. One of them is the TURBOVAC line with mechanical rotor suspension, another one is the TURBOVAC MAG line with magnetic rotor suspension and finaly the TUBOVAC i Series with hybrid rotor suspension. Each product line contains “classic” turbomolecular pumps as well as turbomolecular pumps with a compound stage, whereby smaller backing pumps can be used.

TURBOVAC MAG DIGITAL

Magnetic Rotor Suspension / External Frequency Converter

The TURBOVAC MAG turbomolecular vacuum pumps with magnetic rotor suspension pressure range from 10^-1 mbar (0.75•10^-1Torr) to 10^-10 mbar (0.75•10^-10 Torr). Pumping speeds for air vary from 300 l/s to 3,200 l/s. The TURBOVAC MAG pumps are used in applications where low noise level, extremely low vibration or hydrocarbon-free vacuum conditions are important. As well in applications with corrosive gases or for analytical instruments and research and development.

TURBOVAC MAG W 2000 C/CT