Vacuum measuring

controlling

Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10^-12 mbar/ 0.75•10^-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.

Active Sensorss

The Active Sensorss (CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC) are made for direct integration into the vacuum system control. Display and operation units are optional. The passive sensor (PIEZOVAC) is delivered completely including display and operation unit.

THERMOVAC TTR

Transmitter

THERMOVAC transmitters TTR are Active Sensorss (pressure to voltage converters) using thermal conductivity after the very robust MEMS Pirani technology together with a PIEZO diaphragm (TTR101). Depending on the field of application, a selection between different sensors in the pressure measure range between 10^-5 and 1500 mbar mbar is possible. The THERMOVAC transmitter are benchmark concerning measurement uncertainty and resilient to vibration and shock venting.

THERMOVAC TTR 91 N