Measuring and analysis instruments
Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10-12 mbar/ 0.75•10-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.
Pressure measurement
and display devices
Active Sensors
The active sensors (CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC) are made for direct integration into the vacuum system control. Display and operation units are optional. The passive sensor (PIEZOVAC) is delivered completely including display and operation unit.
THERMOVAC-Transmitters
THERMOVAC transmitters TTR are active sensors (pressure to voltage converters) using thermal conductivity after the very robust MEMS Pirani technology together with a PIEZO diaphragm (TTR101). Depending on the field of application, a selection between different sensors in the pressure measure range between 10-5 and 1500 mbar mbar is possible. The THERMOVAC transmitter are benchmark concerning measurement uncertainty and resilient to vibration and shock venting.
THERMOVAC TTR
Transmitter
THERMOVAC transmitters TTR are active sensors (pressure to voltage converters) using thermal conductivity after the very robust MEMS Pirani technology together with a PIEZO diaphragm (TTR101). Depending on the field of application, a selection between different sensors in the pressure measure range between 10-5 and 1500 mbar mbar is possible. The THERMOVAC transmitter are benchmark concerning measurement uncertainty and resilient to vibration and shock venting.
THERMOVAC TTR 91 R
Operation of the THERMOVAC transmitters is based on the thermal conductivity principle after Pirani. Different versions offer set point relays for improved process control. The THERMOVAC series is equipped with a LED-ring (360°) showing the sensor status.
Benefits:
- New MEMS-Pirani for high resistance
- Fast response and high accuracy: time saving and highly reliable
- Optimized price-to-performance ratio
Principle of measurement:
Thermal conductivity after Pirani
Measurement/display range:
5 x 10-5 to 1000 mbar