TTR 91 R DN16KF_1228885
Representative image only

TTR 91 R DN16KF

Connecting cableType: A
Pressure Range5 x 10^-5 mbar - 1000 mbar
100_18_02_Product_Overview_2019_EN.pdf
179_96_02_TTR_91_R_EN.pdf
CAD_230049V01.zip
CP_060_Vacuum_Measuring_Controlling_EN.pdf
FVT_Fundamentals_of_Vacuum_Technology_EN58774555441f3.pdf
HS1_Leybold_EN.pdf
HS2_Leybold_EN.pdf
Overview

Measuring and analysis instruments

Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10-12 mbar/ 0.75•10-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.

Pressure measurement

and display devices

Active Sensors

The active sensors (CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC) are made for direct integration into the vacuum system control. Display and operation units are optional. The passive sensor (PIEZOVAC) is delivered completely including display and operation unit.

THERMOVAC-Transmitters

THERMOVAC transmitters TTR are active sensors (pressure to voltage converters) using thermal conductivity after the very robust MEMS Pirani technology together with a PIEZO diaphragm (TTR101). Depending on the field of application, a selection between different sensors in the pressure measure range between 10-5 and 1500 mbar mbar is possible. The THERMOVAC transmitter are benchmark concerning measurement uncertainty and resilient to vibration and shock venting.

THERMOVAC TTR

Transmitter

THERMOVAC transmitters TTR are active sensors (pressure to voltage converters) using thermal conductivity after the very robust MEMS Pirani technology together with a PIEZO diaphragm (TTR101). Depending on the field of application, a selection between different sensors in the pressure measure range between 10-5 and 1500 mbar mbar is possible. The THERMOVAC transmitter are benchmark concerning measurement uncertainty and resilient to vibration and shock venting.

THERMOVAC TTR 91 R

Operation of the THERMOVAC transmitters is based on the thermal conductivity principle after Pirani. Different versions offer set point relays for improved process control. The THERMOVAC series is equipped with a LED-ring (360°) showing the sensor status.

Benefits:

  • New MEMS-Pirani for high resistance
  • Fast response and high accuracy: time saving and highly reliable
  • Optimized price-to-performance ratio

Principle of measurement:

Thermal conductivity after Pirani

Measurement/display range:

5 x 10-5 to 1000 mbar

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