MKS MFC, N2, 10 SCCM, 15 Pin Analog, N.C. Viton, LCEA11CS1BV20

The MKS general purpose multi-gas, multi-range elastomer-sealed mass flow controller is engineered to deliver reliable flow control for flow rates up to 50 slm. The controller supports digital I/O options including RS485, Profibus, EtherCAT, and DeviceNet, and features a patented thermal sensor design that ensures exceptional zero stability. With standard Viton seals and valve plug options of Buna, Neoprene, or Kalrez, the GE50A accommodates a variety of gas applications. Designed with a standard 3-inch footprint, the controller fits seamlessly into existing gas lines without requiring modifications, while fast digital control electronics provide response times around 500 milliseconds for stable and repeatable flow regulation. Digital calibration delivers 1% of setpoint accuracy on the calibration gas, and an embedded user interface makes it easy to change device range, select user gas, and monitor performance. All wetted surfaces are metal, with minimal use of elastomers for improved durability and leak integrity.

Product Features

• Flow rates up to 50 slm, N2 equivalent
• Patented thermal sensor design for exceptional zero stability
• Digital I/O: RS485, Profibus, EtherCAT, or DeviceNet
• Response time typically less than 750 milliseconds
• Digital calibration achieving 1% of setpoint accuracy on calibration gas
• Standard closed conductance leak rate below 0.1% of Full Scale
• Minimal elastomer use: one external elastomer seal and elastomer valve plug
• Standard Viton seals, with options for Buna, Neoprene, or Kalrez
• Standard 3-inch footprint for easy installation into existing systems
• Embedded user interface for real-time monitoring and device configuration

Applications

The MKS general purpose mass flow controller is suited for a wide range of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent. Ideal for research laboratories, production facilities, and other environments demanding precise gas flow control across multiple gases and ranges.

Benefits

• Percent of setpoint accuracy enables precise process control and consistent results
• Fast response time reduces process variability and enhances productivity
• Compact design fits into existing systems without modification, saving time and cost
• Versatile seal options support a variety of gases and applications
• Robust construction with metal wetted surfaces ensures reliability and longevity
• User-friendly interface simplifies configuration and monitoring

Why Choose the MKS MFC N2, 10 SCCM, 15 Pin Analog, N.C. Viton, LCEA11CS1BV20?

The MKS MFC combines speed, precision, and versatility to meet the needs of modern gas flow applications. With digital control electronics, patented thermal sensor technology, and customizable seal options, this mass flow controller delivers stable, repeatable performance in a compact footprint. It’s an ideal choice for laboratories and industrial systems alike, supporting accurate gas flow control and reduced maintenance over time.