MKS high density mixed I/O gives you the lowest possible price per point. High-resolution and high-accuracy analog and digital I/O for Ethernet, DeviceNet™, and Profibus® networks provide a flexible environment to build the controller with the exact specifications you require.
- Analog, digital, and combination versions, ready for industrial applications
- OEM and D-sub connector packages
- 3U Eurocard with rear distribution and turn-key packages
- Solutions from 16-176 I/O points
The MKS Automation Platform can be configured with a variety of I/O Modules, depending on the type sensors, actuators, valves, and other devices that are being integrated with the MKS Programmable Automation Controller (PAC) or the MKS CM. MKS I/O slices communicate to the MKS PAC or CM via the L-BUS or EtherCAT, creating a scalable distributed I/O system.
| MFC Mass Flow Controller Module | Mass Flow Controller slice (15 & 9 pin MFC's) |
Mass Flow Controller Module
MKS MFC mass flow controller modules provide a compact and high density solution for integrating MKS MFC's with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers that are fully powered and controlled through the MFC slice. Each MKS MFC Module supports integrating 4 MKS mass flow controllers.
