Mass Flow Controller Module, DB15, 4 Channel_1197007
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Mass Flow Controller Module, DB15, 4 Channel

TypeMass Flow Controller Module
ADC Native Resolution14-bit
Auxiliary Power Supply24V ±5%, This input will be used to power MFCs connected through IO connector. Each power output to MFC should be protected separately.
Power ConsumptionAssuming each MFC consumes 250 mA and all AOs are fully loaded ≥24 V_IO@1.5 Amp, 24 V_CORE@ 0.15 Amp
Anti-alias HW Filtering200Hz ±20%, 6dB/octave minimum
Connector15 pin D-Sub
Analog Input Minimum Input CMRR50dB, 0-1kHz
Analog Input Maximum Integral Non-linearity±2LSB (14-bit @ 14v)
Analog Input Number of AO Channels16, Single Ended, (4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
Analog Input Voltage Range-2V to 14V
Operating Temperature0 - 55°C
AltitudeUp to 2000 meters
Dimensions52.5 x 125 x 92.3 mm
MountingDIN Rail
MKS Automation Platform data sheet
Overview

MKS high density mixed I/O gives you the lowest possible price per point. High-resolution and high-accuracy analog and digital I/O for Ethernet, DeviceNet™, and Profibus® networks provide a flexible environment to build the controller with the exact specifications you require.

  • Analog, digital, and combination versions, ready for industrial applications
  • OEM and D-sub connector packages
  • 3U Eurocard with rear distribution and turn-key packages
  • Solutions from 16-176 I/O points

The MKS Automation Platform can be configured with a variety of I/O Modules, depending on the type sensors, actuators, valves, and other devices that are being integrated with the MKS Programmable Automation Controller (PAC) or the MKS CM. MKS I/O slices communicate to the MKS PAC or CM via the L-BUS or EtherCAT, creating a scalable distributed I/O system.

MFC Mass Flow Controller Module Mass Flow Controller slice (15 & 9 pin MFC's)

Mass Flow Controller Module

MKS MFC mass flow controller modules provide a compact and high density solution for integrating MKS MFC's with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers that are fully powered and controlled through the MFC slice. Each MKS MFC Module supports integrating 4 MKS mass flow controllers.

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