The MKS GM50A Mass Flow Controller (MFC) is a versatile, metal-sealed flow control device designed for a wide range of applications requiring precise control of gas flow from 5 sccm up to 50 slm (N2 equivalent). It features state-of-the-art digital flow control electronics combined with a patented thermal sensor and mechanical design for exceptional performance and reliability.
Product Features
- Flow control range from 5 sccm to 50 slm full scale, N2 equivalent
- Embedded user interface for easy device range changes and gas selection to reduce inventory
- In-situ monitoring of device functionality and performance data collection
- 10µ inch electropolished 316L stainless steel surface finish for high purity applications
- Wide variety of digital I/O options including EtherCAT, DeviceNet, Profibus, PROFINET, and RS485
- Analog output options: 0 to 5 VDC or 4 to 20 mA
Benefits
- Patented thermal sensor design delivers exceptional zero stability for accurate readings
- Percent of set point accuracy on calibration gas enables precise process control
Why Choose the MKS GM50A Carbon Monoxide 10,000 sccm, 1/2" Swagelok Fittings, EtherCAT, No Valve Mass Flow Meter?
With its advanced thermal sensor technology and flexible digital and analog interfaces, the MKS GM50A Mass Flow Controller offers high precision, reliable operation, and ease of integration for diverse gas flow control applications. The metal-sealed construction and high purity finish make it especially suited for demanding industrial and research environments.
