The MKS GE50A is a versatile general purpose mass flow controller suitable for a wide variety of flow control applications requiring from 10 sccm to 50 slpm full scale, N2 equivalent.
Applications
- General purpose flow control for industrial gas processes
- Applications requiring flow control from 10 sccm to 50 slpm
- Replacement for legacy MFCs with minimal system modifications
Product Features
- Digitally controlled with RS485, Profibus, EtherCAT, or DeviceNet I/O options
- Advanced MKS control algorithms for fast and repeatable response (typical 500 ms)
- 1% of setpoint accuracy on calibration gas for precise flow control
- Compact 3-inch footprint allows easy retrofit without modifying existing gas lines
- Minimal elastomer design: only one external elastomer seal and valve plug
- All wetted surfaces constructed from metal for durability and compatibility
- Standard Viton seals; options include Buna, Neoprene, or Kalrez for different gases
- Embedded user interface enables easy adjustment of device range, gas type, and performance monitoring
Benefits
- Patented thermal sensor design ensures exceptional zero stability
- High accuracy improves process control and repeatability
- Embedded user interface simplifies setup and ongoing monitoring
- Compact design reduces downtime and installation costs during replacement
- Robust metal wetted surfaces provide reliability in demanding environments
Why Choose the MKS GE50A N2 50 slpm?
The MKS GE50A mass flow controller is engineered for accuracy, flexibility, and ease of integration. Its advanced digital controls, durable construction, and multiple communication protocols make it ideal for a wide range of gas flow control applications, delivering precise and reliable performance with minimal maintenance.
