The MKS GE50A digitally-controlled mass flow controller offers versatile flow control with advanced digital electronics that ensure fast, repeatable response to setpoint changes. Designed for easy integration, this MFC supports RS485, Profibus, EtherCAT, and DeviceNet I/O protocols. Its compact 3-inch footprint allows seamless replacement without modifying existing gas line setups.
Product Features
- Digital control electronics with fast response times around 500 milliseconds
- 1% of setpoint accuracy on calibration gas for precise flow control
- Wide I/O compatibility including RS485, Profibus, EtherCAT, and DeviceNet protocols
- Standard 3-inch footprint for easy installation and retrofit
- Minimal elastomer use with only one external elastomer seal and valve plug
- All wetted surfaces made of metal for durability
- Standard Viton seals, optional Buna, Neoprene, or Kalrez seals available for different gas requirements
- Embedded user interface for changing device range, selecting gas, and monitoring performance
Applications
- General purpose flow control applications requiring 10 sccm to 50 slm full scale, N2 equivalent
Benefits
- Patented thermal sensor design provides exceptional zero stability
- High accuracy ensures precise and repeatable process control
- Embedded user interface simplifies configuration and monitoring
- Compact design reduces system modification and downtime
- Robust metal wetted surfaces enhance reliability and chemical compatibility
Why Choose the MKS GE50A N2 20 slpm?
The MKS GE50A is a reliable, accurate, and flexible mass flow controller suitable for a broad range of gas flow applications. Its advanced digital control, versatile I/O options, and durable construction make it an excellent choice for demanding industrial environments requiring precise flow management.
