The MKS GE50A Mass Flow Controller delivers precise, digitally controlled gas flow for demanding applications. Designed for nitrogen (N2) at 500 SCCM, it features a normally closed Kalrez seal configuration and RS-485 digital communication. The advanced digital control electronics use the latest MKS algorithms, enabling fast and repeatable set point response times around 500 milliseconds, while digital calibration ensures 1% of set point accuracy on the calibration gas.
Product Features
- Flow rates from 5 to 50,000 SCCM cover a broad range of applications
- RS-485 digital interface for reliable communication and integration
- Seal and valve plug options include Kalrez, Viton, Buna, and Neoprene
- Choice of digital (EtherCAT, DeviceNet, Profibus, PROFINET, RS485) and analog (0-5 VDC or 4-20 mA) I/O options
- Standard closed conductance leak rate of less than 0.1% of full scale
- Typical settling time under 750 milliseconds ensures rapid stabilization
- Digital calibration provides 1% of set point accuracy on calibration gas
Benefits
- Precise and repeatable gas flow control for critical processes
- Flexible integration with modern digital systems and legacy analog equipment
- Durable Kalrez seals offer excellent chemical resistance
- Fast response times help maintain process stability and reduce cycle times
- Reliable leak-tight design minimizes gas losses and enhances safety
Why Choose the MKS GE50A Mass Flow Controller, N2, 500 SCCM, RS-485, N.C. Kalrez?
Engineered for precision and flexibility, the MKS GE50A Mass Flow Controller combines fast digital control, durable Kalrez sealing, and versatile communication options. It ensures consistent performance and seamless integration into new or existing gas delivery systems, making it ideal for industries requiring accuracy and reliability.
