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MKS G-Series GE50A013103RMV020 digitally-controlled mass flow controller
The G-Series digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The G-Series digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
