The G-Series GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow rates from 5 to 50,000 sccm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez
- Analog, RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O
- Standard closed conductance leak rate of less than 0.1% of Full Scale
- Less than 750 millisecond settling time
