MFC, H2, 10K SCCM, 15 PIN ANALOG (TIED GROUNDS), N.C. TEFLON, LCMA14CR1MM20_1450214
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MFC, H2, 10K SCCM, 15 PIN ANALOG (TIED GROUNDS), N.C. TEFLON, LCMA14CR1MM20

Overview

The GM50A & GM51A digitally-controlled mass flow controllers are available with either analog or RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.

  • Flow rates from 5 to 50,000 sccm
  • Metal sealed with Teflon valve plug
  • Analog, RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O
  • Standard closed conductance leak rate of less than 1.0% of Full Scale
  • Less than 750 millisecond settling time

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