Vacuum measuring

controlling

Today, the total range of vacuum pressure accessible to measurement extends from atmospheric pressure (about 1000 mbar (750 Torr)) down to 10^-12 mbar/ 0.75•10^-12 Torr, i.e. it extends over 15 powers of ten. The instruments used for measuring the pressure within this wide range are called vacuum gauges. For physical reasons it is not possible to create a single vacuum sensor through which it might be possible to perform quantitative measurements within the entire pressure range. Therefore, a variety of different vacuum gauges are available, each with their own characteristic measurement range which commonly extends over several powers of ten.

Active Sensorss

The Active Sensorss (CERAVAC, THERMOVAC, PENNINGVAC and IONIVAC) are made for direct integration into the vacuum system control. Display and operation units are optional. The passive sensor (PIEZOVAC) is delivered completely including display and operation unit.

IONIVAC-Combi-Transmitters

IONIVAC-Transmitters ITR are Active Sensorss (pressure to voltage converters) which are based on the Bayard-Alpert principle. A hot cathode emits electrons which impinge on an anode. The gas of which is to be measured, is thus ionized. The resulting positive ion current is detected through the third electrode and this current is used as the signal which is proportional to the pressure. The Hot Cathode Ionization sensors offer a wide measurement range of 10^-10 to 10^-1 mbar (0.75·10^-10 to 0.75·10^-1 Torr).

IONIVAC ITR 200 S / SP / SD / SL

IONIVAC ITR 200 SD DeviceNet interface