e-Vision 2 General Purpose Residual Gas Analyzer 1-100amu Tungsten Filament_1326849
Representative image only

e-Vision 2 General Purpose Residual Gas Analyzer 1-100amu Tungsten Filament

TypeResidual Gas Analyzer
Measurement TechniqueMass Spectrometry
Mass Range1-100 or 1-200 amu
FilamentsTungsten or Thoria Coated Iridium
Filter length100 mm
Maximum Analyzer Operating Pressure1e-4 Torr (1.3e-4 mbar)
Ion Source Sensitivity2e-4 A/mbar
Minimum Detectable Concentration2e-11 Torr (2.6e-11 mbar) Faraday
Mass Stability±0.1 amu over 8 hours at stable ambient
Bake out temperature250°C with electronics removed
Operating Temperature200°C Faraday only with electronics 10-40°C
Settling Time<20ms
Command StructureDocumented ASCII command protocols
ComplianceCE (control unit)
Overview

The e-Vision 2 RGA is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money.

  • Leak detection of vacuum lines, welds and seals
  • Vacuum diagnostics
  • Pump down monitoring
  • Chamber bake out monitoring
  • Leak checking of coolant lines within a vacuum chamber
  • Chamber contaminant monitoring

Over 40,000 Customers Trust John Morris