Dry Compressing Vacuum Pumps

Dry vacuum pumps are dry compressing pumps where no lubricants can get into contact with the pumping media. Thus an absolute hydrocarbon free vacuum is the result. Leybold offers different types of dry compressing vacuum pumps which vary in the principle of operation and are used in different fields of application: diaphragm pumps DIVAC, scroll pumps SCROLLVAC as well as screw type pumps SCREWLINE and DRYVAC.

DRYVAC

Screw Vacuum Pumps

The DRYVAC is a new family of dry compressing vacuum pumps. Depending on the application the pumps are available with various equipment components. The DRYVAC series specially is developed for photovoltaic, display and process industry applications. All versions of the DRYVAC family are water cooled, very compact and can simply be mounted to various vacuum systems, so particularly with regard to the well-proven RUVAC WH, WS and WA series.

DRYVAC

The DRYVAC standard version and the DRYVAC DV S offer an optimized pumping speed also at pressures > 100 mbar. DV and DV S versions are particularly adequate for the use in short cycle applications (i. e. load lock) or for the evacuation of large recipients. The DRYVAC DV C versions are especially reliable in harsh processes. They are optimized for processing of typical media used for the production of flat panel displays or photovoltaic components.

DRYVAC DVR 5000